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  • 25 mm High-Precision Direct-Drive Linear Motor Stage

    The MP-DDS-25-1.5-0.2 is a high-precision single-axis linear motion stage driven by a moving magnet track linear motor. It integrates a 1 nm resolution linear analog encoder and high-rigidity crossed-roller bearings, delivering excellent positioning accuracy, high repeatability, high speed, and superior motion stability. This stage is ideal for applications that demand the highest positioning precision, including semiconductor equipment, precision optics, laser processing, automated inspection, biomedical devices, and scientific research.

    Product features:25 mm precision linear travel;Unidirectional accuracy of ±1.5 μm;Repeatability < 0.2 μm;Moving magnet linear motor direct drive – no leadscrew;1 nm high‑resolution linear encoder for full closed‑loop control;Supports high‑speed continuous scanning and precision positioning

    Part Number:MP-DDS-25-1.5-0.2

    Application area:Semiconductor manufacturing equipment | Wafer inspection stages | Optical lens adjustment | Automated fibre optic coupling | Laser processing equipment | AOI (Automated Optical Inspection) | Scientific research and laboratory equipment

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    Main parameters
  • Core parameters
  • Unidirectional Positioning Accuracy Repeatability

    1.5 µm < 0.2 µm

  • Dimension Drawing
  • General Parameters

    Parameter

    Value

    Accuracy (unidirectional)

    1.5 µm

    AutoDetect

    Yes

    Axes of Motion

    1

    Built‑in Controller

    No

    CE Compliant

    Yes

    Encoder Count Resolution

    1 nm

    Encoder Type

    Linear analog encoder

    Force Constant

    3.7 N/A(0.8 lbs/A)

    Guide Type

    Crossed-Roller Bearing

    Horizontal Runout

    < 4 µm

    Inductance

    0.09 mH/phase

    Limit or Home Sensing

    Optical Index Mark

    Maximum Acceleration

    78.5 m/s²

    Maximum Centered Load

    100 N

    Maximum Continuous Thrust

    6 N

    Maximum Speed

    800 mm/s

    Minimum Incremental Move

    12 nm

    Minimum Speed

    0.61 nm/s

    Motor Connection

    D-sub 26-pin

    Motor Rated Current

    1800 mA/phase

    Motor Type

    Moving Magnet Track Linear Motor

    Motor Winding Resistance

    2.3 Ω/phase

    Mounting Interface

    M6 threaded holes

    Moving Mass

    0.29 kg

    Operating Temperature Range

    0 ~ 50 °C

    Peak Thrust

    16 N

    Pitch

    0.006°

    Recommended Controller

    X-MCC (48 V) recommended

    Repeatability

    < 0.2 µm

    Roll

    0.005°

    Speed Resolution

    0.61 nm/s

    Stiffness in Pitch

    500 N·m/°

    Stiffness in Roll

    500 N·m/°

    Stiffness in Yaw

    400 N·m/°

    Travel Range

    25 mm

    Typical Velocity Stability

    ±0.33% at 100 mm/s with a 1.0 kg payload

    Vacuum Compatible

    No

    Vertical Runout

    < 4 µm

    Weight

    0.88 kg

    Yaw

    0.005°


    Typical Positioning Accuracy Curve

    图片1.png


    Optional Configurations

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    Downloads

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  • Product title: 25 mm High-Precision Direct-Drive Linear Motor Stage
  • Product link: https://www.idealphotonics.com/product/detail/1613.html
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