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25 mm High-Precision Direct-Drive Linear Motor Stage
The MP-DDS-25-1.5-0.2 is a high-precision single-axis linear motion stage driven by a moving magnet track linear motor. It integrates a 1 nm resolution linear analog encoder and high-rigidity crossed-roller bearings, delivering excellent positioning accuracy, high repeatability, high speed, and superior motion stability. This stage is ideal for applications that demand the highest positioning precision, including semiconductor equipment, precision optics, laser processing, automated inspection, biomedical devices, and scientific research.
Product features:25 mm precision linear travel;Unidirectional accuracy of ±1.5 μm;Repeatability < 0.2 μm;Moving magnet linear motor direct drive – no leadscrew;1 nm high‑resolution linear encoder for full closed‑loop control;Supports high‑speed continuous scanning and precision positioning
Part Number:MP-DDS-25-1.5-0.2
Application area:Semiconductor manufacturing equipment | Wafer inspection stages | Optical lens adjustment | Automated fibre optic coupling | Laser processing equipment | AOI (Automated Optical Inspection) | Scientific research and laboratory equipment
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Unidirectional Positioning Accuracy Repeatability
1.5 µm < 0.2 µm

Parameter | Value |
Accuracy (unidirectional) | 1.5 µm |
AutoDetect | Yes |
Axes of Motion | 1 |
Built‑in Controller | No |
CE Compliant | Yes |
Encoder Count Resolution | 1 nm |
Encoder Type | Linear analog encoder |
Force Constant | 3.7 N/A(0.8 lbs/A) |
Guide Type | Crossed-Roller Bearing |
Horizontal Runout | < 4 µm |
Inductance | 0.09 mH/phase |
Limit or Home Sensing | Optical Index Mark |
Maximum Acceleration | 78.5 m/s² |
Maximum Centered Load | 100 N |
Maximum Continuous Thrust | 6 N |
Maximum Speed | 800 mm/s |
Minimum Incremental Move | 12 nm |
Minimum Speed | 0.61 nm/s |
Motor Connection | D-sub 26-pin |
Motor Rated Current | 1800 mA/phase |
Motor Type | Moving Magnet Track Linear Motor |
Motor Winding Resistance | 2.3 Ω/phase |
Mounting Interface | M6 threaded holes |
Moving Mass | 0.29 kg |
Operating Temperature Range | 0 ~ 50 °C |
Peak Thrust | 16 N |
Pitch | 0.006° |
Recommended Controller | X-MCC (48 V) recommended |
Repeatability | < 0.2 µm |
Roll | 0.005° |
Speed Resolution | 0.61 nm/s |
Stiffness in Pitch | 500 N·m/° |
Stiffness in Roll | 500 N·m/° |
Stiffness in Yaw | 400 N·m/° |
Travel Range | 25 mm |
Typical Velocity Stability | ±0.33% at 100 mm/s with a 1.0 kg payload |
Vacuum Compatible | No |
Vertical Runout | < 4 µm |
Weight | 0.88 kg |
Yaw | 0.005° |
Typical Positioning Accuracy Curve

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