MEMS VCSEL Laser Diode

Vertical-Cavity Surface-Emitting Laser (VCSEL) is a semiconductor laser based on gallium arsenide (GaAs) material, which emits light vertically from the top surface, fundamentally different from light-emitting diodes (LEDs) and laser diodes (LDs).It consists of reflective mirrors, an active layer, and a metal contact layer. The two emission mirrors are P-type and N-type distributed Bragg reflectors (DBR) respectively, and the active region is composed of quantum wells.A metal contact layer is fabricated on the outer surface of the P-type DBR to form ohmic contact, and a circular aperture is opened on the P-type DBR for laser output.This laser features a small far-field divergence angle with a narrow, circular beam, low threshold current, and high modulation frequency up to 300 kHz.Wavelength tuning can be realized by adjusting the driving current and operating temperature.The package integrates a thermoelectric cooler (TEC) and a photodetector (PD), specially designed for high-speed optical fiber applications.