- Cart
- |
- Personal Center
- |


High-Precision Voice Coil Motor Linear Motion Stage
The MP-LS-10-8-0.05 is an integrated high-precision voice coil motor linear positioning stage, designed for nanometer-scale positioning and high-speed precision motion control applications. It employs moving-magnet voice coil drive technology, combined with a linear analog encoder and cross-roller guideways, to achieve high resolution, high repeatability, and stable motion performance. The stage incorporates a built-in motion controller, which can be controlled via an RS‑232 communication interface and supports the Zaber ASCII communication protocol. It is suitable for research experiments, optical system integration, semiconductor equipment, and precision automation applications.
Product features:10 mm precision linear stroke;Repeatability < 0.05 μm;Unidirectional positioning accuracy 8 μm;Voice coil motor direct drive – no mechanical backlash;Integrated motion controller for simplified system integration;Linear analog encoder with closed‑loop feedback
Part Number:MP-LS-10-8-0.05
Application area:Semiconductor inspection equipment | Optical precision positioning | Laser processing equipment | Microscopy imaging systems | Automated test platforms | Nanopositioning systems | Research experimental platforms
Add to Cart Request for Quotation Consult Favorite
Unidirectional Positioning Accuracy Repeatability
8 μm <0.05 μm

Technical Specifications
Parameter | Specification |
Number of Axes | 1 axis |
Stroke | 10 mm |
Maximum Continuous Force | 5 N |
Peak Force | 15 N |
Moving Mass | 0.18 kg |
Total Weight | 0.5 kg |
Unidirectional Positioning Accuracy | 8 μm |
Repeatability | <0.05 μm |
Minimum Incremental Motion | 10 nm |
Encoder Resolution | 1 nm |
Minimum Speed | 0.61 nm/s |
Speed Resolution | 0.61 nm/s |
Motor Type | Moving-magnet voice coil motor |
Force Constant | 2.23 N/A |
Guide Type | Creep-free cross-roller guide |
Encoder Type | Linear analog encoder |
Built‑in Controller | Yes |
Communication Interface | RS-232 |
Communication | Zaber ASCII(default) |
Data Connector | Locking M8 4-pin connector |
Analog Inputs | 1 channel |
Digital Inputs | 2 channels |
Digital Outputs | 1 channel |
LED Status Indicator | Yes |
Power Input | 48 VDC |
Power Connector | 2‑pin screw terminal |
Operating Temperature | 0~50 ℃ |
Vacuum Compatibility | Not supported |
--
Request for Quotation
We will reply to all your information about the product in time.
⇪