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    • High-Precision Direct-Drive Voice Coil Motor Linear Stage

    The MP-VCS-12-4-0.5 is a high-dynamic precision linear motion stage that employs voice coil direct-drive technology. Equipped with a 1 nm resolution linear analog encoder and crossed-roller bearings, it delivers high speed, high acceleration, and sub-micron positioning accuracy. This stage is ideal for high-end motion control applications including semiconductor manufacturing, precision optical alignment, laser processing, biomedical equipment, research instrumentation, and automated inspection.

    Product features：12 mm precision motion travel；Unidirectional positioning accuracy of 4 μm；Repeatability < 0.5 μm；High‑precision direct‑drive voice coil motor – no leadscrew, no mechanical backlash；1 nm encoder resolution for nanoscale position feedback；Crossed‑roller bearings for high rigidity and stability

    Part Number：MP-VCS-12-4-0.5

    Application area：Semiconductor equipment | Optical alignment platforms | Laser processing equipment | AOI (Automated Optical Inspection) | Wafer inspection | Fibre optic coupling systems | Scientific research and experimental apparatus

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    Main parameters
  • Core parameters

  • Unidirectional Positioning Accuracy Repeatability

    4μm < 0.5 µm

  • Dimension Drawing
    • General Parameters

    Parameter

    Value

    Accuracy (unidirectional)

    4 µm

    AutoDetect

    Yes

    Axes of Motion

    1

    Built‑in Controller

    No

    CE Compliant

    Yes

    Encoder Count Resolution

    1 nm

    Encoder Type

    Linear analog encoder

    Force Constant

    12.6 N/A（2.8 lbs/A）

    Guide Type

    Crossed-Roller Bearing

    Horizontal Runout

    < 5 µm

    LED Indicators

    Yes

    Limit or Home Sensing

    Optical Index Mark

    Maximum Acceleration

    245 m/s²

    Maximum Centered Load

    100 N

    Maximum Continuous Thrust

    12 N

    Maximum Speed

    1400 mm/s

    Mechanical Drive System

    Moving coil, direct drive

    Minimum Incremental Move

    200 nm

    Minimum Speed

    0.61 nm/s

    Motor Connection

    D-sub 26-pin

    Motor Type

    Voice Coil Linear Actuator

    Mounting Interface

    M6 and M3 threaded holes

    Moving Mass

    0.095 kg

    Operating Temperature Range

    0~50 °C

    Peak Thrust

    26 N

    Pitch

    0.01°

    Recommended Controller

    X-MCC (48 V) recommended

    Repeatability

    < 0.5 µm

    Roll

    0.01°

    Speed Resolution

    0.61 nm/s

    Stiffness in Pitch

    50 N·m/°

    Stiffness in Roll

    70 N·m/°

    Stiffness in Yaw

    85 N·m/°

    Travel Range

    12 mm

    Typical Velocity Stability

    ±4.7% at 10 mm/s with a 0.38 kg payload

    Vacuum Compatible

    No

    Vertical Runout

    < 6 µm

    Weight

    0.8 kg

    Yaw

    0.01°

     

    Positioning Accuracy Curve

    图片1.png 


    Optional Configurations

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    Downloads

    No resources available

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  • Product title: High-Precision Direct-Drive Voice Coil Motor Linear Stage
  • Product link: https://www.idealphotonics.com/product/detail/1612.html

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      • Other Requirements:

    • 10+ 10 Years of Experience
    • 50 50 + Countries Bussiness
    • 10000 10k + Diodes sold worldwide
    • 30 30+ Invention patent
    • 10 10+ Advanced Optical Solutions

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